Control of Ge/Si intermixing during Ge island growth

Applied Physics Letters

Volumn 94, Issue 5, 2009, Pages

  Leite, Marina S ^a   Kamins, T I ^b   Medeiros Ribeiro, G ^a,b  

^a LABORATÓRIO NACIONAL DE LUZ SÍNCROTRON   (Brazil)

^b HEWLETT PACKARD LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; GERMANIUM; GROWTH (MATERIALS); PHOSPHORUS COMPOUNDS; SEMICONDUCTING GERMANIUM COMPOUNDS; SURFACE CHEMISTRY; SURFACE TENSION;

COMPOSITION PROFILES; GE ISLANDS; H2 ATMOSPHERES; ISLAND SHAPES; SI(0 0 1); SURFACE ENERGIES;

GROWTH KINETICS;

EID: 59849116501     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3078289     Document Type: Article

References (18)

1. E. P. McDaniel, Q. Jiang, P. A. Crozier, J. Drucker, and D. J. Smith, Appl. Phys. Lett. 0003-6951 10.1063/1.2135870 87, 223101 (2005).
2. G. Katsaros, G. Costantini, M. Stoffel, R. Esteban, A. M. Bittner, A. Rastelli, U. Denker, O. G. Schmidt, and K. Kern, Phys. Rev. B 0163-1829 10.1103/PhysRevB.72.195320 72, 195320 (2005).
3. M. S. Leite, G. Medeiros-Ribeiro, T. I. Kamins, and R. Stanley Williams, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.98.165901 98, 165901 (2007).
4. G. Medeiros-Ribeiro and R. Stanley Williams, Nano Lett. 1530-6984 10.1021/nl062530k 7, 223 (2007).
5. Y. Tu and J. Tersoff, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.98. 096103 98, 096103 (2007).
6. M. S. Leite, A. Malachias, S. W. Kycia, T. I. Kamins, R. Stanley Williams, and G. Medeiros-Ribeiro, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.100.226101 100, 226101 (2008).
7. M. Copel, M. C. Reuter, E. Kaxiras, and R. M. Tromp, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.63.632 63, 632 (1989).
8. M. Copel, M. C. Reuter, M. Horn von Hoegen, and R. M. Tromp, Phys. Rev. B 0163-1829 10.1103/PhysRevB.42.11682 42, 11682 (1990).
9. A. Portavoce, M. Kammler, R. Hull, M. C. Reuter, M. Copel, and F. M. Ross, Phys. Rev. B 0163-1829 10.1103/PhysRevB.70.195306 70, 195306 (2004).
10. M. Katayama, T. Nakayama, M. Aono, and C. F. McConville, Phys. Rev. B 0163-1829 10.1103/PhysRevB.54.8600 54, 8600 (1996).
11. N. Paul, S. Filimonov, V. Cherepanov, M. akmak, and B. Voigtländer, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.98.166104 98, 166104 (2007).
12. T. I. Kamins, D. A. A. Ohlberg, and R. Stanley Williams, Appl. Phys. Lett. 0003-6951 10.1063/1.1361096 78, 2220 (2001).
13. T. I. Kamins, G. Medeiros-Ribeiro, D. A. A. Ohlberg, and R. Stanley Williams, J. Appl. Phys. 0021-8979 10.1063/1.1604957 94, 4215 (2003).
14. O. A. Schmidt, U. Denker, S. Christiansen, and F. Ernst, Appl. Phys. Lett. 0003-6951 10.1063/1.1507612 81, 2614 (2002).
15. A. Rastelli, M. Kummer, and H. von Kanel, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.87.256101 87, 256101 (2001).
16. T. Merdzhanova, S. Kiravittaya, A. Rastelli, M. Stoffel, U. Denker, and O. G. Schmidt, Phys. Rev. Lett. 0031-9007 10.1103/PhysRevLett.96.226103 96, 226103 (2006).
17. M. S. Leite, T. I. Kamins, and G. Medeiros-Ribeiro (unpublished).
18. Since the mounds are in the same scale as the AFM measurement noise it was not possible to infer their line scans after the etching.