Influence of substrate surface polarity on homoepitaxial growth of ZnO layers by chemical vapor deposition

Physical Review B - Condensed Matter and Materials Physics

Volumn 79, Issue 3, 2009, Pages

  Wagner, Markus R ^a   Bartel, Til P ^a   Kirste, Ronny ^a   Hoffmann, Axel ^a   Sann, Joachim ^b   Lautenschläger, Stefan ^b   Meyer, Bruno K ^b   Kisielowski, C ^c  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b JUSTUS LIEBIG UNIVERSITY   (Germany)

^c LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 59249104999     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.79.035307     Document Type: Article

References (46)

1. R. E. Sherriff, D. C. Reynolds, D. C. Look, B. Jogai, J. E. Hoelscher, T. C. Collins, G. Cantwell, and W. C. Harsch, J. Appl. Phys. 88, 3454 (2000). 10.1063/1.1288159
2. B. Meyer and D. Marx, Phys. Rev. B 67, 035403 (2003). 10.1103/PhysRevB.67.035403
3. H. Matsui, H. Saeki, T. Kawai, A. Sasaki, M. Yoshimoto, M. Tsubaki, and H. Tabata, J. Vac. Sci. Technol. B 22, 2454 (2004). 10.1116/1.1792237
4. H. Xu, K. Ohtani, M. Yamao, and H. Ohno, Appl. Phys. Lett. 89, 071918 (2006). 10.1063/1.2337541
5. M. Sumiya, K. Yoshiumra, K. Ohtsuka, and S. Fuke, Appl. Phys. Lett. 76, 2098 (2000). 10.1063/1.126267
6. F. Tuomisto, K. Saarinen, B. Lucznik, I. Grzegory, H. Teisseyre, T. Suski, S. Porowski, P. R. Hageman, and J. Likonen, Appl. Phys. Lett. 86, 031915 (2005). 10.1063/1.1854745
7. L. K. Li, M. J. Jurkovic, W. I. Wang, J. M. V. Hove, and P. P. Chow, Appl. Phys. Lett. 76, 1740 (2000). 10.1063/1.126152
8. A. J. Ptak, T. H. Myers, L. T. Romano, C. G. V. de Walle, and J. E. Northrup, Appl. Phys. Lett. 78, 285 (2001). 10.1063/1.1339255
9. D. C. Look, D. C. Reynolds, C. W. Litton, R. L. Jones, D. B. Eason, and G. Cantwell, Appl. Phys. Lett. 81, 1830 (2002). 10.1063/1.1504875
10. X.-L. Guo, J.-H. Choi, H. Tabata, and T. Kawai, Jpn. J. Appl. Phys., Part 2 40, L177 (2001). 10.1143/JJAP.40.L177
11. S. A. Chevtchenko, J. C. Moore, Ü. Özgür, X. Gu, A. A. Baski, H. Morkoç, B. Nemeth, and J. E. Nause, Appl. Phys. Lett. 89, 182111 (2006). 10.1063/1.2378589
12. H. Karzel, Phys. Rev. B 53, 11425 (1996). 10.1103/PhysRevB.53.11425
13. S. Desgreniers, Phys. Rev. B 58, 14102 (1998). 10.1103/PhysRevB.58.14102
14. Ü. Özgür, Y. I. Alivov, C. Liu, A. Teke, M. A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho, and H. Morkoc, J. Appl. Phys. 98, 041301 (2005). 10.1063/1.1992666
15. R. D. Shannon, Acta Crystallogr., Sect. A: Cryst. Phys., Diffr., Theor. Gen. Crystallogr. 32, 751 (1976). 10.1107/S0567739476001551
16. C. Kübel and A. Thust, in NATO Science Series II: Mathematics, Physics and Chemistry (Springer Netherlands, 2006), Vol. 211, pp. 373-392.
17. A. Howie, Ultramicroscopy 98, 73 (2004). 10.1016/j.ultramic.2003.08.002
18. T. V. Shubina, Phys. Rev. B 67, 195310 (2003). 10.1103/PhysRevB.67.195310
19. R. Kilaas, MACTEMPAS, 2007 (http://www.totalresolution.com).
20. T. P. Bartel, Ph.D. thesis, Technical University of Berlin (2008).
21. http://ncem.lbl.gov/TEAM project/
22. J. J. Hopfield, J. Phys. Chem. Solids 15, 97 (1960). 10.1016/0022- 3697(60)90105-0
23. J. J. Hopfield and D. G. Thomas, Phys. Rev. Lett. 15, 22 (1965). 10.1103/PhysRevLett.15.22
24. J. Wrzesinski, Ph.D. thesis, University Dortmund, Germany, 1997.
25. S. F. Chichibu, T. Sota, G. Cantwell, D. B. Eason, and C. W. Litton, J. Appl. Phys. 93, 756 (2003). 10.1063/1.1527707
26. G. Kurtze, W. Maier, K. Kempf, G. Schmieder, H. Schrey, C. Klingshirn, B. Hönerlage, and U. Rössler, in Proceedings of the 15th International Conference on the Physics of Semiconductors, Kyoto 1980
27. [J. Phys. Soc. Jpn. 49, Suppl. A, 559 (1980)].
28. G. Blattner, G. Kurtze, G. Schmieder, and C. Klingshirn, Phys. Rev. B 25, 7413 (1982). 10.1103/PhysRevB.25.7413
29. A. Teke, Ü. Özgür, S. Dogan, X. Gu, H. Morkoc, B. Nemeth, J. Nause, and H. O. Everitt, Phys. Rev. B 70, 195207 (2004). 10.1103/PhysRevB.70.195207
30. D. C. Reynolds, D. C. Look, B. Jogai, and T. C. Collins, Appl. Phys. Lett. 79, 3794 (2001). 10.1063/1.1412435
31. B. Gil, A. Lusson, V. Sallet, S.-A. Said-Hassani, R. Triboulet, and P. Bigenwald, Jpn. J. Appl. Phys., Part 2 40, L1089 (2001). 10.1143/JJAP.40.L1089
32. J. Rowe, M. Cardona, and F. Pollak, Solid State Commun. 6, 239 (1968). 10.1016/0038-1098(68)90043-4
33. J. Wrzesinski and D. Frohlich, Phys. Rev. B 56, 13087 (1997). 10.1103/PhysRevB.56.13087
34. B. Bateman, J. Appl. Phys. 33, 3309 (1962). 10.1063/1.1931160
35. I. B. Kobiakov, Solid State Commun. 35, 305 (1980). 10.1016/0038-1098(80) 90502-5
36. B. K. Meyer, Phys. Status Solidi B 241, 231 (2004). 10.1002/pssb. 200301962
37. S. Lautenschlaeger, J. Sann, N. Volbers, B. K. Meyer, A. Hoffmann, U. Haboeck, and M. R. Wagner, Phys. Rev. B 77, 144108 (2008). 10.1103/PhysRevB.77. 144108
38. T. C. Damen, S. P. S. Porto, and B. Tell, Phys. Rev. 142, 570 (1966). 10.1103/PhysRev.142.570
39. S. S. Mitra, O. Brafman, W. B. Daniels, and R. K. Crawford, Phys. Rev. 186, 942 (1969). 10.1103/PhysRev.186.942
40. F. Decremps, J. Pellicer-Porres, A. M. Saitta, J.-C. Chervin, and A. Polian, Phys. Rev. B 65, 092101 (2002). 10.1103/PhysRevB.65.092101
41. J. Serrano, A. H. Romero, F. J. Manjon, R. Lauck, M. Cardona, and A. Rubio, Phys. Rev. B 69, 094306 (2004). 10.1103/PhysRevB.69.094306
42. T. Gruber, G. M. Prinz, R. Kling, F. Reuss, W. Limmer, and A. Waag, J. Appl. Phys. 96, 289 (2004). 10.1063/1.1755433
43. V. Ratnikov, R. Kyutt, T. Shubina, T. Paskova, E. Valcheva, and B. Monemar, J. Appl. Phys. 88, 6252 (2000). 10.1063/1.1321021
44. M. R. Wagner, U. Haboeck, P. Zimmer, A. Hoffmann, S. Lautenschläger, C. Neumann, J. Sann, and B. Meyer, Proc. SPIE 6474, 64740X (2007). 10.1117/12.717785
45. B. K. Meyer, J. Sann, S. Lautenschläger, M. R. Wagner, and A. Hoffmann, Phys. Rev. B 76, 184120 (2007). 10.1103/PhysRevB.76.184120
46. D. C. Look, G. C. Farlow, P. Reunchan, S. Limpijumnong, S. B. Zhang, and K. Nordlund, Phys. Rev. Lett. 95, 225502 (2005). 10.1103/PhysRevLett.95.225502