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Japanese Journal of Applied Physics

Volumn 47, Issue 11, 2008, Pages 8364-8368

Effect of water adsorption on electrical characteristics of porous silica films

(3) Kayaba, Yasuhisa a Kohmura, Kazuo b Klkkawa, Takamaro a

a HIROSHIMA UNIVERSITY (Japan)

b MITSUI CHEMICALS INC (Japan)

Author keywords

Leakage current; Low dielectric constant material; Low K; Porous silica; Proton conduction; Water adsorption

Indexed keywords

ADSORPTION; ATMOSPHERIC HUMIDITY; CERAMIC CAPACITORS; COLLOIDS; DIELECTRIC WAVEGUIDES; ELECTRIC FIELD EFFECTS; ELECTRIC FIELDS; GELATION; HEAT CONDUCTION; IONIZATION OF LIQUIDS; LEAKAGE CURRENTS; METEOROLOGY; MOISTURE; OXIDES; PERMITTIVITY; PROTONS; SILICA; SOL-GEL PROCESS;

LEAKAGE CURRENT; LOW-DIELECTRIC-CONSTANT MATERIAL; LOW-K; POROUS SILICA; PROTON CONDUCTION; WATER ADSORPTION;

DEWATERING;

EID: 58749109966 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.8364 Document Type: Article

Times cited : (11)

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