A comparative study of the technology and architecture for actuators realized with PZT layers in LTCC structures

Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005

Volumn , Issue , 2005, Pages 349-354

  Belavič, Darko ^a   Zarnik, Marina Santo ^a   Hrovat, Marko ^b   Holc, Janez ^b   Kosec, Marija ^b   Malič, Barbara ^b   Drnovšek, Silvo ^b   Cilenšek, Jena ^b  

^a HIPOT RandD   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Ceramic MEMS; LTCC substrate; Piezoelectric actuator; Thick film

Indexed keywords

DIELECTRIC PERMITTIVITIES; LEAD ZIRCONATE TITANATE; LOW TEMPERATURE CO-FIRED CERAMICS; LTCC SUBSTRATES; MICRO ELECTRO MECHANICAL SYSTEM; PIEZOELECTRIC PARAMETERS; SINTERING TEMPERATURES; THICK-FILM TECHNOLOGY;

BRIDGES; CERAMIC MATERIALS; DIAPHRAGMS; DIELECTRIC LOSSES; EXHIBITIONS; MEMS; MICROSYSTEMS; NANOCANTILEVERS; PERMITTIVITY; SCREEN PRINTING; SEMICONDUCTING LEAD COMPOUNDS; SINTERING; SUBSTRATES; TECHNOLOGY; THICK FILMS;

PIEZOELECTRIC ACTUATORS;

EID: 84877767020     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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