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Volumn 56, Issue 4, 2002, Pages 518-521

Low temperature firing of PZT thick films prepared by screen printing method

Author keywords

Hysteresis; Low temperature firing; Piezoelectric materials; PZT; Screen printing; Thick films

Indexed keywords

ALUMINA; FERROELECTRICITY; HYSTERESIS; LEAD COMPOUNDS; LOW TEMPERATURE OPERATIONS; MICROACTUATORS; MICROMACHINING; MICROSENSORS; MICROSTRUCTURE; PEROVSKITE; PIEZOELECTRIC MATERIALS; SCREEN PRINTING; SILICON; TERNARY SYSTEMS;

EID: 0036795069     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(02)00543-8     Document Type: Article
Times cited : (27)

References (11)
  • 2
    • 0031145860 scopus 로고    scopus 로고
    • Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy
    • Lee C., Itoh T., Maeda R., Suga T. Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy. Rev. Sci. Instrum. 68(5):1997;2091-2100.
    • (1997) Rev. Sci. Instrum. , vol.68 , Issue.5 , pp. 2091-2100
    • Lee, C.1    Itoh, T.2    Maeda, R.3    Suga, T.4
  • 4
    • 0000576650 scopus 로고    scopus 로고
    • 3 thick films prepared for microactuators by aerosol deposition
    • 3 thick films prepared for microactuators by aerosol deposition. Appl. Phys. Lett. 77(11):2000;1710-1712.
    • (2000) Appl. Phys. Lett. , vol.77 , Issue.11 , pp. 1710-1712
    • Akedo, J.1    Lebedev, M.2
  • 6
    • 0033903421 scopus 로고    scopus 로고
    • Fabrication of PZT thick films on silicon substrates for piezoelectric actuator
    • Jeon Y., Chung J., No K. Fabrication of PZT thick films on silicon substrates for piezoelectric actuator. J. Electroceram. 4(1):2000;195-199.
    • (2000) J. Electroceram. , vol.4 , Issue.1 , pp. 195-199
    • Jeon, Y.1    Chung, J.2    No, K.3
  • 7
    • 0030785141 scopus 로고    scopus 로고
    • Thick-film resonant piezo-layers as new gravimetric sensors
    • Ferrari V., Marioli D., Taroni A. Thick-film resonant piezo-layers as new gravimetric sensors. Meas. Sci. Technol. 8:1997;42-48.
    • (1997) Meas. Sci. Technol. , vol.8 , pp. 42-48
    • Ferrari, V.1    Marioli, D.2    Taroni, A.3
  • 8
    • 0033322017 scopus 로고    scopus 로고
    • 3 system piezoelectric thick films in low-temperature firing process
    • 3 system piezoelectric thick films in low-temperature firing process. Jpn. J. Appl. Phys. 38:1999;5535-5538.
    • (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 5535-5538
    • Kubota, T.1    Tanaka, K.2    Sakabe, Y.3
  • 9
    • 0033700529 scopus 로고    scopus 로고
    • An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon
    • Jones P.G., Beeby S.P., Dargie P., Papakostas T., White N.M. An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon. Meas. Sci. Technol. 11:2000;526-531.
    • (2000) Meas. Sci. Technol. , vol.11 , pp. 526-531
    • Jones, P.G.1    Beeby, S.P.2    Dargie, P.3    Papakostas, T.4    White, N.M.5
  • 11
    • 0033321405 scopus 로고    scopus 로고
    • Development of lead zirconate titanate family thick films on various substrates
    • Akiyama Y., Yamanaka K., Fujisawa E., Kowata Y. Development of lead zirconate titanate family thick films on various substrates. Jpn. J. Appl. Phys. 38(9B):1999;5524-5527.
    • (1999) Jpn. J. Appl. Phys. , vol.38 , Issue.9 B , pp. 5524-5527
    • Akiyama, Y.1    Yamanaka, K.2    Fujisawa, E.3    Kowata, Y.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.