Numerical modelling of ceramic mems structures with piezoceramic thick films

Journal of Electroceramics

Volumn 20, Issue 1, 2008, Pages 3-9

  Zarnik, Marina Santo ^b   Belavic, Darko ^a,b   Ursic, Hana ^b   MacEk, Srecko ^b  

^a HIPOT   (Slovenia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

D31; Finite element analysis; LTCC; Nanoindentation; Thick film PZT

Indexed keywords

CERAMIC MATERIALS; FINITE ELEMENT METHOD; NANOINDENTATION; NUMERICAL METHODS; PIEZOELECTRIC MATERIALS;

LEAD-ZIRCONATE-TITANATE (PZT) STRUCTURES; LTCC; PIEZOCERAMIC THICK FILMS;

THICK FILMS;

EID: 38749099826     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9329-6     Document Type: Conference Paper

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