PZT thin-film actuator driven micro optical scanning sensor by 3D integration of optical and mechanical devices

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 435-440

  Ikeda, Masaaki ^a   Totani, Hiromi ^a   Akiba, Akira ^a   Goto, Hiroshi ^a   Matsumoto, Mikio ^a   Yada, Tsuneji ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; OBJECT RECOGNITION; OPTICAL BEAM SPLITTERS; OPTICAL INSTRUMENT LENSES; OPTICAL SENSORS; PHOTODETECTORS; SCANNING; SEMICONDUCTOR LASERS; THIN FILM DEVICES;

MICRO-OPTICAL SCANNING SENSORS;

MICROSENSORS;

EID: 0032687819     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746868     Document Type: Conference Paper

References (11)