AFM nanoindentation: Tip shape and tip radius of curvature effect on the hardness measurement

Journal of Physics Condensed Matter

Volumn 20, Issue 47, 2008, Pages

  Calabri, L ^a   Pugno, N ^b   Menozzi, C ^a   Valeri, S ^a,c  

^a INFM   (Italy)

^b POLITECNICO DI TORINO   (Italy)

^c UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

HARDNESS; MATERIALS PROPERTIES; MATHEMATICAL MODELS; MEASUREMENTS; MECHANICAL PROPERTIES; NANOINDENTATION; VICKERS HARDNESS TESTING;

AFM NANOINDENTATION; AFM PROBES; CORNER ANGLES; CORRECTION FACTORS; HARDNESS MEASUREMENTS; HIGH RESOLUTIONS; INDENTATION PROCESSES; INDENTER; INDENTERS; LOAD APPLICATIONS; MECHANICAL PROPERTIES OF MATERIALS; NANOINDENTER; NANOSCALE; NUMERICAL SIMULATIONS; RADIUS OF CURVATURES; THEORETICAL MODELS; TIP RADIUSES; TIP SHAPES;

ATOMIC FORCE MICROSCOPY;

EID: 58149305673     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/20/47/474208     Document Type: Article

References (18)

1. Li X and Bhushan B 2002 A review of nanoindentation continuous stiffness measurement technique and its applications Mater. Charact. 48 11-36
2. Saha R and Nix W D 2002 Effects of the substrate on the determination of thin film mechanical properties by nanoindentation Acta Mater. 50 23-38
3. Zhang F, Saha R, Huang Y, Nix W D, Hwang K C, Qu S and Li M 2007 Indentation of a hard film on a soft substrate: strain gradient hardening effects Int. J. Plast. 23 25-43
4. Bhushan B and Koinkar V N 1994 Nanoindentation hardness measurements using atomic force microscopy Appl. Phys. Lett. 64 1653-55
5. Doerner M F and Nix W D 1986 A method for interpreting the data from depth-sensing indentation instruments J. Mater. Res. 1 601-09
6. Oliver W C and Pharr G M 1992 An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments J. Mater. Res. 7 1564
7. Oliver W C and Pharr G M 2004 Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology J. Mater. Res. 19 1
8. Pharr G M, Oliver W C and Brotzen F R 1992 On the generality of the relationship among contact stiffness, contact area, and elstic modulus during indentation J. Mater. Res. 7 613
9. Withers J R and Aston D E 2006 Nanomechanical measurements with AFM in the elastic limit Adv. Colloid Interface Sci. 120 57-67
10. Miyake K, Fujisawa S, Korenaga A, Ishida T and Sasaki S 2004 The effect of pile-up and contact area on hardness test by nanoindentation Japan. J. Appl. Phys. 43 4602-5
11. Beegan D, Chowdhury S and Laugier M T 2005 Work of indentation methods for determining copper film hardness Surf. Coat. Technol. 192 57-63
12. Poole W J, Ashby M F and Fleck N A 1996 Micro-hardness of annealed and work-hardened copper polycrystals Scr. Mater. 34 559-64
13. Pharr G M 1998 Mater. Sci. Eng. A 253 151-9
14. Saha R, Xue Z, Huang Y and Nix W D 2001 Indentation of a soft metal film on a hard substrate: strain gradient hardening effects J. Mech. Phys. Solids 49 1997-2014
15. Calabri L, Pugno N, Rota A, Marchetto D and Valeri S 2007 Nanoindentation shape-effect: experiments, simulations and modeling J. Phys.: Condens. Matter 19 395002-13
16. Pugno N M 2007 A general shape/size-effect law for nanoindentation Acta Mater. 55 1947-53
17. Yoshimoto K, Stoykovich M P, Cao H B, de Pablo J J, Nealey P F and Drugan W J 2004 A two-dimensional model of the deformation of photoresist structures using elastoplastic polymer properties J. Appl. Phys. 96 1857-65
18. Calabri L, Pugno N, Rota A, Marchetto D and Valeri S 2007 J. Phys.: Condens. Matter 19 395002