Radio frequency driven DC electron beam source

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4590-4594

  Shaw, Denis M ^a   Watanabe, Masahiro ^a   Collins, George J ^a   Sugai, Hideo ^b  

^a Department of Mechanical Engineering   (United States)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ARGON; COLD CATHODE TUBES; ELECTRIC FIELDS; ELECTRIC POTENTIAL; IONS; MATHEMATICAL MODELS; PLASMAS; PRESSURE EFFECTS; SECONDARY EMISSION;

ELECTRON BEAM ACCELERATION; ELECTRON BEAM CURRENT; ELECTRON BEAM ENERGY; INDUCTIVELY COUPLED PLASMA; ION FLUX; ION IMPINGEMENT; RADIO FREQUENCY BIAS VOLTAGE;

ELECTRON BEAMS;

EID: 0033157450     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4590     Document Type: Article

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