SOI-enabled MEMS processes lead to novel mechanical, optical, and atomic physics devices

Proceedings - IEEE International SOI Conference

Volumn , Issue , 2008, Pages 5-8

  Herrera, G V ^a   Bauer, Todd ^a   Blain, M G ^a   Dodd, P E ^a   Dondero, R ^a   Garcia, E J ^a   Galambos, P C ^a   Hetherington, D L ^a   Hudgens, J J ^a   McCormick, F B ^a   Nielson, G N ^a   Nordquist, C D ^a   Okandan, M ^a   Olsson, R H ^a   Ortiz, K ^a   Platzbecker, M R ^a   Resnick, P J ^a   Shul, R J ^a   Shaw, M J ^a   Sullivan, C T ^a   Watts, M R ^a   more..

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DATA STORAGE EQUIPMENT; HARDENING; INTEGRATED CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; PHOTONICS; QUANTUM COMPUTERS; RADIATION HARDENING; RADIATION PROTECTION; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICES; SILICON WAFERS; TECHNOLOGY;

DIVERSE APPLICATIONS; ION TRAPS; MEMS PROCESSES; MICRO RESONATORS; NOVEL DEVICES; OPTICAL PHENOMENONS; OPTICAL-; PHYSICS-BASED; QUANTUM COMPUTING; RF-MEMS; SANDIA NATIONAL LABORATORIES; SEMICONDUCTOR PROCESSES; SILICON ON INSULATORS; SOI PROCESSES; SOI TECHNOLOGIES; SOI WAFERS;

ATOMIC PHYSICS;

EID: 57749168374     PISSN: 1078621X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SOI.2008.4656269     Document Type: Conference Paper

References (18)

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