Fabrication techniques for creating a thermally isolated TM-FPA (thermal microphotonic focal plane array)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6883, Issue , 2008, Pages

  Shaw, Michael J ^a   Watts, Michael R ^a   Nielson, Gregory N ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Infrared sensing; Integrated optics devices; Optical loss; Resonators; Silicon nitride; Waveguide

Indexed keywords

INFRARED SENSING; INTEGRATED OPTICS DEVICES; OPTICAL LOSS;

INFRARED RADIATION; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; SILICON NITRIDE; SILICON WAFERS;

OPTICAL FIBER FABRICATION;

EID: 41149114571     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.764632     Document Type: Conference Paper

References (5)

1. Guo, J., Shaw, M. J., Vawter, G. A., Hadley, G. R., Esherick, P., and Sullivan, C. T., "High-Q microring resonator for biochemical sensors", Integrated Optics: Devices, Materials, and Technologies IX, Proceedings of SPIE, Vol. 5728, p. 83-92, March 2005.
2. Suzuki, K., Takiguchi, K., "Monolithically Integrated Resonator Microoptic Gyro On Silica Planar Lightwave Circuit", J. of Lightwave Tech., Vol. 18, p. 66-72, January 2000.
3. Watts, M. R., Shaw, M. J., Nielson, G. N., "Microphotonic thermal imaging" Nature Photonics, Vol. 1, p. 632-634, November 2007.
4. Shaw, M. J., Guo, J., Vawter, G. A., Habermehl, S., and Sullivan, C. T., "Fabrication techniques for low loss silicon nitride waveguides" Micromachining Technology for Micro-Optics and Nano-Optics III, Proceedings of SPIE, Vol. 5720, p. 109-118, 2005.
5. Radford, W., Murphy, D., Finch, A., Hay, K., Kennedy, A., Ray, M., Sayed, A., Wyles, J., Wyles, R., and Varesi, J., "Sensitivity improvements in uncooled microbolometer FPAs", Infrared Technology and Applications XXV Proceedings of SPIE, Vol. 3698, p. 119-130, July 1999.