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Volumn 1, Issue 11, 2008, Pages 1122011-1122012
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Room-temperature bonding of vertical-cavity surface-emitting laser chips on Si substrates using Au microbumps in ambient air
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
CURRENT VOLTAGE CHARACTERISTICS;
INERT GASES;
LASERS;
OPTICAL WAVEGUIDES;
SILICON;
SURFACE EMITTING LASERS;
ACTIVATED BONDINGS;
AMBIENT AIRS;
AU SURFACES;
CAVITY SURFACES;
LASER CHIPS;
MEASURED RESULTS;
MICRO BUMPS;
SI SUBSTRATES;
SILICON SUBSTRATES;
TEMPERATURE BONDINGS;
VCSEL CHIPS;
BONDING;
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EID: 57649104471
PISSN: 18820778
EISSN: 18820786
Source Type: Journal
DOI: 10.1143/APEX.1.112201 Document Type: Article |
Times cited : (58)
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References (12)
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