Floating-disk parylene microvalves for self-pressure-regulating flow controls

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1352-1361

  Chen, Po Jui ^a   Rodger, Damien C ^b   Humayun, Mark S ^b,c   Tai, Yu Chong ^a  

^a California Institute of Technology   (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^c DOHENY EYE INSTITUTE   (United States)

Author keywords

Flow control; Fluidics; Mechanical engineering; Microelectromechanical devices; Micromachining; Valves

Indexed keywords

BIOCOMPATIBILITY; BIOLOGICAL MATERIALS; COMPOSITE MICROMECHANICS; FILM PREPARATION; FLUIDIC DEVICES; MEDICAL APPLICATIONS; MEMS; MICROFLUIDICS; SURFACE CHEMISTRY; VALVES (MECHANICAL);

ANCHORINGS; CHECK VALVES; FLOATING DISCS; FLUIDIC RESISTANCES; MICRO FLUIDIC APPLICATIONS; MICRO VALVES; PARYLENES; POWER SOURCES; PRESSURE-BASED; STAND -ALONE;

MICROMACHINING;

EID: 57649097199     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2004947     Document Type: Article

References (29)

1. A. van den Berg and T. S. J. Lammerink, "Micro total analysis systems: Microfluidic aspects, integration concept and applications," Microsyst. Technol. Chem. Life Sci. Topics Curr. Chem., vol. 194, pp. 21-49, 1998.
2. S. Shoji, "Fluids for sensor systems," Topics Curr. Chem., vol. 194, pp. 163-188, 1998.
3. K. W. Oh and C. H. Ahn, "A review of microvalves," J. Micromech. Microeng., vol. 16, no. 5, pp. R13-R39, Mar. 2006.
4. G. T. A. Kovacs, Micromachined Transducers Sourcebook. Boston, MA: McGraw-Hill, 1998.
5. S. Sutanto, P. J. Hesketh, and Y. H. Berthelot, "Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer," J. Micromech. Microeng., vol. 16, no. 2, pp. 266-275, Jan. 2006.
6. B. Bae, J. Han, R. I. Masel, and M. A. Shannon, "A bidirectional electrostatic microvalve with microsecond switching performance," J. Microelectromech. Syst., vol. 16, no. 6, pp. 1461-1471, Dec. 2007.
7. I. Fazal and M. C. Elwenspoek, "Design and analysis of a high pressure piezoelectric actuated microvalve," J. Micromech. Microeng., vol. 17, no. 11, pp. 2366-2379, Oct. 2007.
8. P.-J. Chen, D. C. Rodger, E. Meng, M. S. Humayun, and Y.-C. Tai, "Surface-micromachined parylene dual valves for on-chip unpowered microflow regulation," J. Microelectromech. Syst., vol. 16, no. 2, pp. 223-231, Apr. 2007.
9. P.-J. Chen and Y.-C. Tai, "Floating-disk parylene micro check valve," in Proc. 20th IEEE Int. Conf. MEMS, Kobe, Japan, Jan. 21-25, 2007, pp. 453-456.
10. P.-J. Chen, D. C. Rodger, M. S. Humayun, and Y.-C. Tai, "Floating-disk parylene microvalve for self-regulating biomedical flow controls," in Proc. 21st IEEE Int. Conf. MEMS, Tucson, AZ, Jan. 13-17, 2008, pp. 575-578.
11. P. Cousseau, R. Hirschi, B. Frehner, S. Gamper, and D. Maillefer, "Improved micro-flow regulator for drug delivery systems," in Proc. 14th IEEE Int. Conf. MEMS, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 527-530.
12. R. S. Ayyala, J. L. Duarte, and N. Sahiner, "Glaucoma drainage devices: State of the art," Expert Rev. Med. Devices, vol. 3, no. 4, pp. 509-521, Jul. 2006.
13. B. Bae, K. Park, and M. A. Shannon, "MEMS application of actuators and sensors for glaucoma treatment," in MEMS/NEMS Handbook: Techniques and Applications, vol. 5, C. T. Leondes, Ed. New York: Springer-Verlag, 2006, pp. 57-99.
14. T. Pan, M. S. Stay, V. H. Barocas, J. D. Brown, and B. Ziaie, "Modeling and characterization of a valved glaucoma drainage device with implications for enhanced therapeutic efficacy," IEEE Trans. Biomed. Eng., vol. 52, no. 5, pp. 948-951, May 2005.
15. P. V. Loeppert and S. B. Lee, "SiSonic™ - The First Commercialized MEMS microphone," in Proc. 12th Solid-State Sens., Actuators, Microsyst. Workshop, Hilton Head Island, SC, Jun. 4-8, 2006, pp. 27-30.
16. Certificate of Compliance, USP Biological Tests, North Amer. Sci. Assoc., Inc., Northwood, OH, 2005.
17. L. Wolgemuth, "Assessing the performance and suitability of parylene coating," Med. Device Diagn. Ind., vol. 22, pp. 42-49, Aug. 2000.
18. T. A. Harder, T.-J. Yao, Q. He, C.-Y. Shih, and Y.-C. Tai, "Residual stress in thin-film parylene C," in Proc. 15th IEEE Int. Conf. MEMS Las Vegas, NV, Jan. 20-24, 2002, pp. 435-438.
19. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells 2nd ed. New York: McGraw-Hill, 1959.
20. W. C. Young, ROARK's Formulas for Stress & Strain, 6th ed. New York: McGraw-Hill, 1989.
21. P.-J. Chen, D. C. Rodger, S. Saati, J. C. Altamirano, C.-H. Lin, R. Agrawal, R. Varma, M. S. Humayun, and Y.-C. Tai, "Implementation of microfabricated suture-less flexible parylene tissue anchors on minimally invasive biomedical implants," in Proc. 11th Int. MicroTAS Conf., Paris, France, Oct. 7-11, 2007, pp. 518-520.
22. J. C. Lin, P.-J. Chen, S. Saati, R. Varma, M. Humayan, and Y.-C. Tai, "Implantable microvalve-packaged glaucoma drainage tube," in Proc. 13th Solid-State Sens., Actuators, Microsyst. Workshop, Hilton Head Island, SC, Jun. 1-5, 2008, pp. 146-149.
23. X. Q. Wang, Q. Lin, and Y.-C. Tai, "A parylene micro check valve," in Proc. 12th IEEE Int. Conf. MEMS, Orlando, FL, Jan. 17-21, 1999, pp. 177-182.
24. J. Xie, X. Yang, X. Q. Wang, and Y.-C. Tai, "Surface micromachined leakage proof parylene check valve," in Proc. 14th IEEE Int. Conf. MEMS, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 539-542.
25. 3 dry release technology for large freestanding parylene microstructures and electrostatic actuators," Sens. Actuators A, Phys., vol. 97/98, pp. 771-775, Apr. 2002.
26. J. Xie, J. Shih, Q. Lin, B. Yang, and Y.-C. Tai, "Surface micromachined electrostatically actuated micro peristaltic pump," Lab Chip, vol. 4, no. 5, pp. 495-501, Oct. 2004.
27. J. Shih, J. Xie, and Y.-C. Tai, "Surface micromachined and integrated capacitive sensors for microfluidic applications," in Proc. 12th Int. Transducers Conf., Boston, MA, Jun. 8-12, 2003, pp. 388-391.
28. T. Gervais, J. El-Ali, A. Gunther, and K. F. Jensen, "Flow-induced deformation of shallow microfluidic channels," Lab Chip, vol. 6, no. 4, pp. 500-507, Apr. 2006.
29. Q. He, C. Pang, Y.-C. Tai, and T. D. Lee, "Ion liquid chromatography on-a-chip with beads-packed parylene column," in Proc. 17th IEEE Int. Conf. MEMS, Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 212-215.