Floating-disk parylene micro check valve

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 453-456

  Chen, Po Jui ^a   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DISKS (STRUCTURAL COMPONENTS); MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING;

CHECK VALVES; DISK DESIGNS; EXPERIMENTAL DATA; IN CHANNELS; INTERNATIONAL CONFERENCES; MICRO VALVES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICROMACHINED; PARYLENE; REVERSE LEAKAGE;

VALVES (MECHANICAL);

EID: 50149088394     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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