Floating-disk parylene microvalve for self-regulating biomedical flow controls

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 575-578

  Chen, Po Jui ^a   Rodger, Damien C ^b   Humayun, Mark S ^b   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW CONTROL; FLOW OF WATER; MEMS; VALVES (MECHANICAL);

BAND PASS; BIOMEDICAL FLOWS; FLOATING DISCS; MICRO VALVES; MICRO-MACHINED; PARYLENES; POLYMERIC VALVES; PRESSURE FLOW; STAND -ALONE; VALVE SEATS;

BIOCOMPATIBILITY;

EID: 50149112228     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443721     Document Type: Conference Paper

References (7)

1. K.W. Oh and C.H. Ahn, "A Review of Microvalves," Journal of Micromechanics and Microengineering, 16(5), pp. R13-R39, 2006.
2. J. Collier, D. Wroblewski, and T. Bifano, "Development of a Rapid-Response Flow-Control System Using MEMS Microvalve Arrays," Journal of Microelectromechanical Systems, 13(6), pp. 912-922, 2004.
3. B. Yang and Q. Lin, "A Planar Compliance-Based Self-Adaptive Microfluidic Variable Resistor," Journal of Microelectromechanical Systems, 16 (2), pp. 411-419, 2007.
4. P. Cousseau, R. Hirschi, B. Frehner, S. Gamper, and D. Maillefer, "Improved Micro-Flow Regulator for Drug Delivery Systems," Proc. MEMS 2001 Conference, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 527-530.
5. P.-J. Chen, D.C. Rodger, E. Meng, M.S. Humayun, and Y.-C. Tai, "Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation," Journal of Microelectromechanical Systems, 16 (2), pp. 223-231, 2007.
6. P.-J. Chen and Y.-C. Tai, "Floating-Disk Parylene Micro Check Valve," Proc. MEMS 2007 Conference, Kobe, Japan, Jan. 21-25, 2007, pp. 453-456.
7. J. Xie, X. Yang, X. Q. Wang, and Y.-C. Tai, "Surface Micromachined Leakage Proof Parylene Check Valve," Proc. MEMS 2001 Conference, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 539-542.