Stroboscopic digital speckle pattern interferometry for vibration analysis of microsystem

Optics and Lasers in Engineering

Volumn 47, Issue 2, 2009, Pages 252-258

  Yang, L X ^a   Schuth, M ^b   Thomas, D ^a   Wang, Y H ^a,c   Voesing, F ^d  

^a Oakland University   (United States)

^b TRIER UNIVERSITY OF APPLIED SCIENCES   (Germany)

^c HEFEI UNIVERSITY OF TECHNOLOGY   (China)

^d OPTOTRON ^*  (Germany)

Author keywords

Digital speckle pattern interferometry (DSPI); MEMS; Microsystem; Stroboscopic illumination; Vibration measurement

Indexed keywords

COMPOSITE MICROMECHANICS; DEFORMATION; DIGITAL ARITHMETIC; INTERFEROMETERS; INTERFEROMETRY; LASER EXCITATION; LATTICE VIBRATIONS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; OPTOELECTRONIC DEVICES; VIBRATION MEASUREMENT; VIBRATIONS (MECHANICAL);

DIGITAL SPECKLE PATTERN INTERFEROMETRIES; DIGITAL SPECKLE PATTERN INTERFEROMETRY (DSPI); DYNAMIC LOADINGS; LASER SPECKLES; MEASUREMENT AND ANALYSIS; MICRO-ELECTRO-MECHANICAL SYSTEMS; ROUGH SURFACES; SCATTERING SURFACES; SOME APPLICATIONS; SPECKLE INTERFEROMETRIES; STROBOSCOPIC ILLUMINATION; STROBOSCOPIC ILLUMINATIONS;

SPECKLE;

EID: 57049130443     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.04.025     Document Type: Article

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