The accuracy of fast 3D topography measurements

International Journal of Machine Tools and Manufacture

Volumn 41, Issue 13-14, 2001, Pages 1899-1907

  Ohlsson, R ^a   Wihlborg, A ^a   Westberg, H ^a  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GEOMETRY; HONING MACHINES; INTERFEROMETERS; PARAMETER ESTIMATION; ROLLER BEARINGS; STEEL SHEET; SURFACE ROUGHNESS;

THREE DIMENSIONAL TOPOGRAPHY MEASUREMENTS;

SURFACE TESTING;

EID: 0035479657     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(01)00054-2     Document Type: Article

References (11)

1. The scope of three dimensional topography
2. Practical considerations when measuring 3D surface roughness
3. Surface profiles obtained by means of optical methods - Are they true representations of the real surface?
4. Assessment of surface finish on bulk scattering materials: A comparison between optical laser stylus and mechanical stylus profilometers
5. A comprehensive comparative study of 3D surface topography measuring instruments
6. Characterizing 3D topography of engineering and biomaterial surfaces by confocal laser scanning and stylus techniques
7. Direct comparison of mechanical and optical measurement of the finish of precision machined optical surfaces
8. Comparison of the conformity of surface topography measured by optical and stylus instruments
9. 3D surfaces: A comparative study between contact and noncontact instruments
10. On replication and 3D stylus profilometry techniques for measurement of plateau-honed cylinder liner surfaces