|
|
Volumn 7130, Issue , 2008, Pages
|
|
Digital laser microferoscope for NDT
a
|
|
Author keywords
ESPI; Laser speckle interferometry; MEMS; Microscope; Microstructure; Non destructive testing
|
|
Indexed keywords
CHARGE COUPLED DEVICES;
COMPOSITE MICROMECHANICS;
ELECTRONIC MEDICAL EQUIPMENT;
INTERFEROMETERS;
LASER THEORY;
MECHANICAL VARIABLES MEASUREMENT;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROSCOPES;
MICROSTRUCTURE;
NONDESTRUCTIVE EXAMINATION;
SPECKLE;
DISPLACEMENT MEASUREMENTS;
ESPI;
HIGH PRECISION;
LASER SPECKLE INTERFEROMETRY;
LASER SPECKLES;
LONG DISTANCES;
MEASUREMENT SYSTEMS;
MICRO-ELECTRO MECHANICAL SYSTEMS;
NON-DESTRUCTIVE TESTING;
OPTICAL METHODS;
PHASE-SHIFTING TECHNIQUES;
ROUGH SURFACES;
SOFTWARE PROGRAMS;
INTERFEROMETRY;
|
|
EID: 60649111372
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.819662 Document Type: Conference Paper |
|
Times cited : (1)
|
|
References (7)
|
