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Volumn 372, Issue 1, 2000, Pages 50-53
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Preparation of La2O3 thin films by pulse ultrasonic spray pyrolysis method
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL STRUCTURE;
DEPOSITION;
ETHANOL;
LANTHANUM COMPOUNDS;
POLYCRYSTALLINE MATERIALS;
PYROLYSIS;
SILICON WAFERS;
THIN FILMS;
WATER;
NEBULIZATION;
PULSE ULTRASONIC SPRAY PYROLYSIS;
DIELECTRIC FILMS;
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EID: 0034275246
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(00)01035-X Document Type: Article |
Times cited : (44)
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References (11)
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