Static and dynamic characterization of AlN-driven microcantilevers using optical interference microscopy

Optics and Lasers in Engineering

Volumn 47, Issue 2, 2009, Pages 211-216

  Krupa, Katarzyna ^a,b   Józwik, Michał ^b   Gorecki, Christophe ^a   Andrei, Alexandru ^a   Nieradko, Łukasz ^a   Delobelle, Patrick ^a   Hirsinger, Laurent ^a  

^a FEMTO ST INSTITUTE   (France)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Aluminum nitride; Cantilever; Interferometry; MEMS; Quality control; Reliability; Twyman Green interferometer

Indexed keywords

ALUMINA; ALUMINUM COMPOUNDS; CHEMICAL SENSORS; CUSTOMER SATISFACTION; DEFLECTION (STRUCTURES); INTERFEROMETERS; INTERFEROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; NITRIDES; OPTICAL MICROSCOPY; PHOTORESISTS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; QUALITY ASSURANCE; QUALITY CONTROL; QUALITY FUNCTION DEPLOYMENT; RELIABILITY; RESONANCE; SILICON; THREE DIMENSIONAL; TOTAL QUALITY MANAGEMENT;

ALUMINUM NITRIDE; ALUMINUM NITRIDES; AMPLITUDE DISTRIBUTIONS; ANALYTICAL MODELING; CANTILEVER; DEFLECTION DATUMS; DYNAMIC PARAMETERS; EXPERIMENTAL DATUMS; FABRICATION PROCESSES; INITIAL SHAPES; MEMS ACTUATORS; MEMS STRUCTURES; MICRO CANTILEVERS; MICRODEVICES; MICROMACHINING TECHNOLOGIES; MULTIPLE FILMS; NANOINDENTATION TECHNIQUES; NON-CONTACT MEASUREMENTS; OPTICAL INTERFERENCES; PIEZOELECTRIC COEFFICIENTS; PIEZOELECTRIC PROPERTIES; PZT FILMS; RELIABILITY AND STABILITIES; RESONANCE FREQUENCIES; SILICON BEAMS; STATIC AND DYNAMICS; STROBOSCOPIC TECHNIQUES; TESTING DEVICES; TWYMAN-GREEN INTERFEROMETER; VIBRATION MODES;

COMPOSITE MICROMECHANICS;

EID: 56949097758     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.05.001     Document Type: Article

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