Oxygen atom density in capacitively coupled RF oxygen plasma

Vacuum

Volumn 83, Issue 5, 2009, Pages 792-796

  Vrlinic, Tjasa ^a,b   Mille, Caroline ^a   Debarnot, Dominique ^a   Poncin Epaillard, Fabienne ^a  

^a UNIVERSITÉ DU MAINE   (France)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Catalytic probe; Oxygen density; Plasma functionalization; Polymer

Indexed keywords

ABS RESINS; ATOMIC PHYSICS; ATOMS; ELECTROLYSIS; FUNCTIONAL POLYMERS; GAS DISCHARGE TUBES; OXYGEN; PLASMA APPLICATIONS; PLASMA DIAGNOSTICS; PLASMAS; POLYMERS; RATE CONSTANTS; STAINLESS STEEL; SURFACE REACTIONS;

ATOM DENSITIES; CAPACITIVELY COUPLED; CATALYTIC PROBE; CATALYTIC PROBES; DISCHARGE CHAMBERS; GAS PHASE; HIGH POWERS; LOW POWERS; NEUTRAL OXYGEN ATOMS; OXYGEN ATOMS; OXYGEN DENSITY; OXYGEN PLASMAS; PLASMA FUNCTIONALIZATION; PLASMA REACTORS; PROBE POSITIONS; PUMPING SPEEDS; RF GENERATORS; SURFACE FUNCTIONALIZATION;

ELECTRIC DISCHARGES;

EID: 56949097025     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.07.008     Document Type: Article

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