Fabrication of soft reflective microoptical elements using a replication process

Microelectronic Engineering

Volumn 85, Issue 1, 2008, Pages 175-180

  Shih, Teng Kai ^a   Ho, Jeng Rong ^b   Wang, Jui Hao ^a   Chen, Chia Fu ^a,c   Liu, Chueh Yang ^a   Chen, Chien Chung ^d   Whang, Wha Tzong ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

^c MINGDAO UNIVERSITY   (Taiwan)

^d INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Nanoscale powders; PDMS; Reflective elements

Indexed keywords

REFLECTION; RUBBER; SPIN COATING; SURFACE PROPERTIES;

MICRODRILLED HOLES; NANOSCALE POWDERS; REFLECTIVE ELEMENTS; SOFT REPLICA MOLDING PROCESSES;

MICROOPTICS;

EID: 36148939470     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.05.003     Document Type: Article

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