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Journal of Electron Microscopy

Volumn 57, Issue 6, 2008, Pages 189-194

A high-throughput approach for cross-sectional transmission electron microscopy sample preparation of thin films

(2) Yao, Bo a Coffey, Kevin R a

a University of Central Florida (United States)

Author keywords

FePt; FIB; Thin films; Tripod polishing; XTEM sample preparation

Indexed keywords

BINARY ALLOYS; BRITTLE FRACTURE; GRAIN GROWTH; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BEAMS; IRON ALLOYS; MILLING (MACHINING); MULTILAYER FILMS; MULTILAYERS; SILICA; SUBSTRATES; THROUGHPUT;

BRITTLE SUBSTRATES; CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; FIB; GROWTH OF THIN FILMS; HIGH-THROUGHPUT APPROACHES; INTERFACIAL DIFFUSION; SAMPLE PREPARATION; THIN-FILMS; TRIPOD POLISHING; XTEM SAMPLE PREPARATION;

FILM PREPARATION;

EID: 56549130814 PISSN: 00220744 EISSN: 14779986 Source Type: Journal
DOI: 10.1093/jmicro/dfn021 Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.