The structure design of a micro-precision CMM with Abbé Principle

Proceedings of the 35th International MATADOR 2007 Conference

Volumn , Issue , 2007, Pages 297-300

  Fan, K C ^a   Liu, C L ^a   Wu, P T ^a   Chen, Y C ^a   Wang, W L ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b HEFEI UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Abb Principle; Co planarXY stage; Micro CMM; Pagoda brideg; Structural design

Indexed keywords

COORDINATE MEASURING MACHINES; STRUCTURAL DESIGN; TOWERS;

DESIGN CONSIDERATIONS; GEOMETRICAL ACCURACY; HIGH-PRECISION; MICRO-CMM; PAGODA BRIDEG; SPINDLE DESIGN; STRUCTURAL MODULE; STRUCTURE DESIGN;

BRIDGES;

EID: 84900660612     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-1-84628-988-0_67     Document Type: Conference Paper

References (6)

1. Bryan J. B. 1979, The Abbé Principle Revisit: An Updated Interpretation, Precision Engineering, P129-132.
2. Zhang G. X 1989, A Study of the Abbé Principle and Abbé Errors, Annals of CIRP, Vol.38, No.1, P525-529.
3. Bryan J. B. and Carter D. L. 1979, Design of a new Errorcorrected Co-ordinate Measuring Machine, Precision Engineering, P125-128.
4. Jäger J., Manske E., et al, 2002, Nanopositioning and -Measuring Technique, 7th International Symposium on Laser Metrology, Novosibirsk, Russia, Vol. 4900, P755-762.
5. Fan K. C., Fei Y. T. et al, 2006, Development of a low cost Micro-CMM for 3D Micro/nano Measurements," Measurement Science & Technology, Vol. 17, P524-532.
6. Fan K. C., Fei Y. T. et al, 2007, Study of a Non-contact Type Micro-CMM with Arch-bridge and Nanopositioning Stage, Robotics and Computeraided Manufacturing, Vol. 23, Issue 6, P.276-284.