Molecular dynamics study of particle emission by reactive cluster ion impact

Applied Surface Science

Volumn 252, Issue 19, 2006, Pages 6466-6469

  Aoki, Takaaki ^a   Matsuo, Jiro ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

Cluster; Fluorine; Molecular dynamics simulation; Sputtering process; Surface morphology

Indexed keywords

COMPUTER SIMULATION; FLUORINE COMPOUNDS; MORPHOLOGY; SPUTTERING; SURFACE PHENOMENA; TARGETS;

CLUSTER; KINETIC ENERGY DISTRIBUTION; SIZE DISTRIBUTION; THERMAL EQUILIBRIUM;

MOLECULAR DYNAMICS;

EID: 33747193277     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.195     Document Type: Article

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