C 60 ion sputtering of layered organic materials

Applied Surface Science

Volumn 255, Issue 4, 2008, Pages 962-965

  Shard, Alexander G ^a   Green, Felicia M ^a   Gilmore, Ian S ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Buckminsterfullerene; Dynamic SIMS; Organic depth profiling; ToF SIMS

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPTH PROFILING; ION BEAMS; ION SOURCES; SECONDARY ION MASS SPECTROMETRY; TOPOGRAPHY; VACUUM APPLICATIONS;

BUCKMINSTERFULLERENES; CLUSTER ION SOURCES; DYNAMIC SIMS; EXPERIMENTAL ARRANGEMENT; METROLOGICAL PARAMETERS; ORGANIC DEPTH PROFILING; REFERENCE MATERIAL; TOF SIMS;

SPUTTERING;

EID: 56449090546     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2008.05.031     Document Type: Article

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