Modeling and optimization of the growth rate for ZnO thin films using neural networks and genetic algorithms

Expert Systems with Applications

Volumn 36, Issue 2 PART 2, 2009, Pages 4061-4066

  Ko, Young Don ^a   Moon, Pyung ^a   Kim, Chang Eun ^a   Ham, Moon Ho ^a   Myoung, Jae Min ^a   Yun, Ilgu ^a  

^a Yonsei University   (South Korea)

Author keywords

Genetic algorithms; Neural networks; PLD; Process modeling; ZnO

Indexed keywords

BACKPROPAGATION ALGORITHMS; GENETIC ALGORITHMS; GROWTH RATE; II-VI SEMICONDUCTORS; METALLIC FILMS; NEURAL NETWORKS; OPTICAL FILMS; PROCESS ENGINEERING; PULSED LASER DEPOSITION; THIN FILMS; ZINC OXIDE;

GENETIC ALGORITHM (GAS); MODELING AND OPTIMIZATION; MODELING METHODOLOGY; NEURAL NETWORKS AND GENETIC ALGORITHMS; NONLINEAR PROCESS MODELS; PROCESS CONDITION; PROCESS MODELING; RESPONSE FACTOR;

FILM GROWTH;

EID: 56349157402     PISSN: 09574174     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.eswa.2008.03.010     Document Type: Article

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