State of the art in deterministic production of optical thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7101, Issue , 2008, Pages

  Ristau, D ^a   Ehlers, H ^a   Schlichting, S ^a   Lappschies, M ^b  

^a LASER ZENTRUM HANNOVER E V   (Germany)

^b Mso Jena Mikroschichtoptik GmbH   (Germany)

Author keywords

Deterministic production; In situ monitoring; Optical broad band monitoring; Optical coating systems

Indexed keywords

COATINGS; DEPOSITION; ION BOMBARDMENT; OPTICAL COATINGS; OPTICAL MATERIALS; PROCESS ENGINEERING; SPUTTERING; SYSTEM STABILITY; THICK FILMS; THIN FILMS;

CURRENT STATES; DEPOSITION CONTROLS; DEPOSITION PROCESSES; DETERMINISTIC PRODUCTION; IN-SITU MONITORING; ION BEAM SPUTTERING; MONITORING SYSTEMS; OPTICAL BROAD BAND MONITORING; OPTICAL THIN FILMS; RECENT DEVELOPMENTS; RUGATE FILTERS; SINGLE LAYERS; SPECTRAL CHARACTERISTICS; STATE OF THE ARTS;

OPTICAL FILMS;

EID: 56349148877     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.797264     Document Type: Conference Paper

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