Characterizations of phosphorus doped ZnO multi-layer thin films to control carrier concentration

Superlattices and Microstructures

Volumn 38, Issue 4-6, 2005, Pages 377-384

  Lim, Sung Hoon ^a   Kim, Jae Won ^a   Kang, Hong Seong ^a   Kim, Gun Hee ^a   Chang, Hyun Woo ^a   Lee, Sang Yeol ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; DOPING (ADDITIVES); PHOSPHORUS; SAPPHIRE; ZINC OXIDE;

SAPPHIRE SUBSTRATE; ZNO MULTILAYER;

THIN FILMS;

EID: 33644538558     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2005.08.008     Document Type: Article

References (11)

1. D.C. Look Mater. Sci. Eng. B 80 2001 383
2. H.S. Kang, J.S. Kang, J.W. Kim, and S.Y. Lee J. Appl. Phys. 95 2004 1246
3. J.F. Chang, H.H. Kuo, I.C. Leu, and M.H. Hon Sens. Actuators B 84 2000 258
4. K. Minegishi, Y. Koiwai, Y. Kikuchi, K. Yano, M. Kasuga, and A. Shimizu Japan. J. Appl. Phys. 36 1997 1453
5. M. Joseph, H. Tabata, H. Saeki, K. Uuedo, and T. Kawai Physica B 302 2001 140
6. S.Y. Lee, E.S. Shim, H.S. Kang, S.S. Pang, and J.S. Kang Thin Solid Films 473 2004 31
7. Y.R. Ryu, T.S. Lee, J.H. Leem, and H.W. White Appl. Phys. Lett. 83 2003 4032
8. T. Aoki, Y. Hatanaka, and D.C. Look Appl. Phys. Lett. 76 2000 3257
9. T. Ohshima, T. Ikegami, K. Ebihara, J. Asmussen, and R. Thareja Thin Solid Films 435 2003 49
10. S.H. Bae, S.Y. Lee, H.Y. Kim, and S.I. Im Appl. Surf. Sci. 168 2000 332
11. K.K. Kim, H.S. Kim, D.K. Hwang, J.H. Lim, and S.J. Park Appl. Phys. Lett. 83 2003 63