Fabrication of microchannel with thin cover layer for an optical waveguide MEMS switch based on microfluidics

IEICE Transactions on Electronics

Volumn E90-C, Issue 1, 2007, Pages 78-86

  Ikemoto, Takuji ^a   Kokubun, Yasuo ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Damascene process; Microchannel; Microelectromechanical system; Optical switch; Thin cover layer

Indexed keywords

FABRICATION; FILMS; GLASS; HERMETIC SEALS; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; NETWORKS (CIRCUITS); OPTICAL SWITCHES; SPUTTER DEPOSITION;

DAMASCENE PROCESS; MICROCHANNELS; MICROELECTROMECHANICAL SYSTEM; THIN COVER LAYERS;

OPTICAL WAVEGUIDES;

EID: 33846409531     PISSN: 09168524     EISSN: 17451353     Source Type: Journal    
DOI: 10.1093/ietele/e90-c.1.78     Document Type: Conference Paper

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