Batch process for the fabrication of LiNbO3 photonic crystals using proton exchange followed by CHF3 reactive ion etching

Optical Materials

Volumn 31, Issue 2, 2008, Pages 196-200

  Ulliac, G ^a   Courjal, N ^a   Chong, H M H ^b,c   Rue, R M De La ^b  

^a FEMTO ST INSTITUTE   (France)

^b UNIVERSITY OF GLASGOW   (United Kingdom)

^c UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Batch fabrication; Lithium niobate; Proton exchange; Reactive ion etching

Indexed keywords

ASPECT RATIO; BATCH DATA PROCESSING; FABRICATION; ION EXCHANGE; IONS; LITHIUM COMPOUNDS; NIOBIUM COMPOUNDS; PHOTONIC CRYSTALS; SUBSTRATES;

BATCH FABRICATION; BATCH PROCESS; CROSS-SECTION MICROGRAPHS; ETCHED PATTERNS; LITHIUM NIOBATE; MICROMETRIC STRUCTURES; OPTIMIZED PARAMETER; PROTON EXCHANGE;

REACTIVE ION ETCHING;

EID: 56149094349     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2008.03.004     Document Type: Article

References (17)

1. Lawrence L. Rep. Prog. Phys. 56 (1993) 363
2. Roussey M., Bernal M.-P., Courjal N., Baida F.I., and Salut R. Appl. Phys. Lett. 89 (2006) 241110
3. Kanter G.S., Kular P., Roussev R., Parameswaran K.R., and Fejer M.M. Opt. Exp. 10 (2002) 177
4. Huang K.C., Bienstman P., Joannopoulos J.D., Nelson K.A., and Fan S. Phys. Rev. Lett. 90 (2003) 196402
5. Roussey M., Baida F.I., and Bernal M.P. JOSA B 24 (2007) 1416
6. Lacour F., Courjal N., Bernal M.P., Spajer M., Sabac A., and Bainier C. Opt. Mater. 27 (2005) 1421
7. Yin S. Proc. IEEE 87 (1999) 1962
8. Barry I.E., Ross G.W., Smith P.G.R., Eason R.W., and Cook G. Mater. Lett. 37 (1998) 246
9. Ward D.W., Startz E.R., and Nelson K.A. Appl. Phys. A, Mater. Sci. Proc. 86 (2007) 49
10. Mizuuchi K., Yamamoto K., and Taniuchi T. Electron. Lett. 26 (1990) 1992
11. Laurell F., Webjörn J., Arvidsson G., and Holmberg J. J. Lightwave Technol. 10 (1992) 1606
12. Wang T.-J., Huang C.-F., Wang W.S., and Wei P.-K. J. Lightwave Technol. 22 (2004) 1764
13. Gill D.M., Jacobson D., White C.A., Jones D.W., Shi Y., Minford W.J., and Harris A. J. Lightwave Technol. 22 (2004) 887
14. Hu H., Milenin A.P., Wehrspohn R.B., Hermann H., and Sohler W. J. Vac. Sci. A 24 A (2006) 1012
15. J. Penaud, Thesis, University of Lille, 2006.
16. Maciak T., and Solowski M. Opt. Appl. 29 (1989) 423
17. Clark D.F., Nutt A.C.G., Wong K.K., Laybourn P.J.R., and De La Rue R.M. Appl. Phys. Lett. 54 (1983) 6218