Deformation reduction of a MEMS sensor by stress balancing of multilayer

Proceedings - 2nd Int. Conf. Sensor Technol. Appl., SENSORCOMM 2008, Includes: MESH 2008 Conf. Mesh Networks; ENOPT 2008 Energy Optim. Wireless Sensors Networks, UNWAT 2008 Under Water Sensors Systems

Volumn , Issue , 2008, Pages 391-395

  Yang, Woo Seok ^a   Cho, Seong M ^a   Ryu, Hojun ^a   Cheon, Sang Hoon ^a   Yu, Byoung Gon ^a   Choi, Chang Auck ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; DEFORMATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MULTILAYERS; PHOTORESISTS; POLYIMIDES; POLYMERS; SENSOR NETWORKS; SENSORS; SILICON; STRENGTH OF MATERIALS; WIRELESS NETWORKS;

FLAT MEMBRANES; GRADIENT STRESSES; INFRARED SENSORS; IR ABSORPTIONS; LARGE DEFORMATIONS; MEAN STRESSES; MEMS SENSORS; MEMS STRUCTURES; OF SENSORS; PLANE DEFORMATIONS; STRESS BALANCING; SUSPENDED MEMBRANES;

WIRELESS SENSOR NETWORKS;

EID: 55849127460     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSORCOMM.2008.81     Document Type: Conference Paper

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