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Volumn 403, Issue 19-20, 2008, Pages 3769-3773
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Substrate effect on texture properties of nanocrystalline TiO2 thin films
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Author keywords
Characterization; Magnetron sputtering; Nanocrystalline; Thin films; TiO2
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Indexed keywords
CHARACTERIZATION;
FILM GROWTH;
LANTHANUM ALLOYS;
MAGNETRON SPUTTERING;
NANOCRYSTALS;
OXIDE FILMS;
OXIDE MINERALS;
SAPPHIRE;
SPUTTERING;
SUBSTRATES;
TITANIUM DIOXIDE;
TITANIUM OXIDES;
DC MAGNETRON SPUTTERING;
DIFFERENT SUBSTRATES;
NANO-CRYSTALLINE TIO;
NANOCRYSTALLINE THIN FILMS;
NANOCRYSTALLINES;
SPUTTERING PRESSURES;
SUBSTRATE ORIENTATION;
SUBSTRATE TEMPERATURE;
THIN FILMS;
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EID: 55349131991
PISSN: 09214526
EISSN: None
Source Type: Journal
DOI: 10.1016/j.physb.2008.07.021 Document Type: Article |
Times cited : (34)
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References (16)
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