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Volumn 419, Issue 1-2, 2002, Pages 65-68
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Structural analysis of TiO2 films grown using microwave-activated chemical bath deposition
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Author keywords
Atomic force microscopy; Chemical bath deposition; Ion beam analysis; Microwave heating; TiO2 thin films
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL VAPOR DEPOSITION;
FILM GROWTH;
ION BEAMS;
MICROWAVE HEATING;
OXYGEN;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SURFACE PROPERTIES;
TITANIUM DIOXIDE;
CHEMICAL BATH DEPOSITIONS;
THIN FILMS;
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EID: 0036850895
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(02)00780-0 Document Type: Article |
Times cited : (18)
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References (18)
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