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Volumn 47, Issue 10 PART 2, 2008, Pages 8208-8213
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Tailoring the matrix in ultra-nanocrystalline diamond films
a
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Author keywords
Film properties; Matrix; Mechanical stress; Ultra nanocrystalline diamond
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC SURFACE WAVE FILTERS;
ACOUSTIC WAVE VELOCITY;
ACOUSTIC WAVES;
ACOUSTICS;
AMORPHOUS CARBON;
AMORPHOUS MATERIALS;
AMORPHOUS SILICON;
ARGON;
CARBON;
CRYSTAL GROWTH;
DIAMONDS;
ELECTRIC CURRENTS;
FILMS;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
FOURIER TRANSFORMS;
GRAIN (AGRICULTURAL PRODUCT);
GRAIN BOUNDARIES;
GRAIN SIZE AND SHAPE;
HYDROGEN;
INERT GASES;
INFRARED SPECTROSCOPY;
MATERIALS PROPERTIES;
MECHANICAL PROPERTIES;
NANOCRYSTALLINE ALLOYS;
NANOCRYSTALLINE MATERIALS;
NANOCRYSTALLINE SILICON;
NANOSTRUCTURED MATERIALS;
NONMETALS;
OPTICAL COATINGS;
OPTICAL FILTERS;
OXYGEN;
SILICON;
SPECTROSCOPIC ANALYSIS;
STRESSES;
TECHNOLOGICAL FORECASTING;
AMORPHOUS CARBON STRUCTURES;
AMORPHOUS MATRIXES;
BOUNDARY EFFECTS;
CARBON AND HYDROGENS;
CRYSTAL MATRIXES;
DIAMOND GRAINS;
DIAMOND-LIKE CARBONS;
FILM PROPERTIES;
FOURIER TRANSFORM INFRARED;
GRAIN SIZES;
MATRIX;
MECHANICAL STRESS;
MECHANICAL STRESSES;
MECHANICAL SYSTEMS;
NANOCRYSTALLINE DIAMOND FILMS;
NANOCRYSTALLINE DIAMONDS;
NEW MATERIALS;
POTENTIAL MATERIALS;
SPECIAL CLASSES;
SUBSTRATE PROPERTIES;
SURFACE ACOUSTIC WAVES;
TECHNOLOGICAL DEVELOPMENTS;
TRIBOLOGICAL APPLICATIONS;
ULTRA-NANOCRYSTALLINE DIAMOND;
AMORPHOUS MATRICES;
CARBON-BASED MATERIALS;
CRYSTAL MATRICES;
ELECTRO-MECHANICAL SYSTEMS;
FOURIER TRANSFORM INFRA-RED SPECTROSCOPIES;
GRAIN BOUNDARY EFFECTS;
SPECIAL CLASS;
SURFACE ACOUSTIC WAVE FILTERS;
TECHNOLOGICAL DEVELOPMENT;
DIAMOND FILMS;
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EID: 55349126755
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.8208 Document Type: Article |
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Times cited : (4)
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References (27)
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