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Volumn 19, Issue 3, 2001, Pages 169-175
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Search for scaling parameters for growth rate and purity of hot-filament CVD diamond
c
Plast Control
(Germany)
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Author keywords
Diamond growth and characterization; Hot filament CVD; Scaling parameters
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
FILM GROWTH;
MIXTURES;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SUBSTRATES;
TERNARY SYSTEMS;
DIAMOND GROWTH;
SCALING PARAMETERS;
DIAMOND FILMS;
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EID: 0035343071
PISSN: 02634368
EISSN: None
Source Type: Journal
DOI: 10.1016/S0263-4368(01)00019-1 Document Type: Article |
Times cited : (14)
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References (17)
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