Process control during diamond coating of tools

International Journal of Refractory Metals and Hard Materials

Volumn 16, Issue 3, 1998, Pages 191-199

  Deuerler, F ^a   Peterseim, J ^b   Gruner, H ^c   Wang, Q ^d   Buck, V ^d  

^a WESTPHALIAN UNIVERSITY OF APPLIED SCIENCES   (Germany)

^b Krupp Thyssen Nirosta GmbH   (Germany)

^c MEDICOAT AG   (Switzerland)

^d UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Diamond film; Low pressure synthesis; Plasma jet CVD; Process parameters; Tools

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; PLASMA JETS;

DIAMOND-COATED TOOLS;

DIAMOND FILMS;

EID: 0031642352     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-4368(98)00019-5     Document Type: Article

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