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Volumn 14, Issue 9-10, 2008, Pages 286-291

PECVD siloxane and fluorine-based copolymer thin films

Author keywords

FTIR; Optics; Plasma polymerization; Thin films; XPS

Indexed keywords

ABS RESINS; CHEMICAL REACTIONS; COPOLYMERIZATION; FLUORINE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; LIGHT REFRACTION; MONOMERS; OPTICAL PROPERTIES; ORGANIC POLYMERS; PHOTOELECTRON SPECTROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA POLYMERIZATION; PLASMAS; POLYMER FILMS; POLYMERIZATION; POLYMERS; REFRACTIVE INDEX; REFRACTOMETERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SPECTROSCOPIC ANALYSIS; SPECTROSCOPIC ELLIPSOMETRY; SPECTRUM ANALYSIS; THICK FILMS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 55349114692     PISSN: 09481907     EISSN: 15213862     Source Type: Journal    
DOI: 10.1002/cvde.200806684     Document Type: Article
Times cited : (9)

References (47)
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  • 47


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.