Preparation and characterization of thin films by plasma polymerization of hexamethyldisiloxane

Thin Solid Films

Volumn 325, Issue 1-2, 1998, Pages 83-86

  Lee, Sang Hee ^a   Lee, Duck Chool ^a  

^a Inha University   (South Korea)

Author keywords

Auger electron spectroscopy; Dielectric properties; Fourier transform infrared spectroscopy; Plasma processing and deposition

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CROSSLINKING; DIELECTRIC PROPERTIES OF SOLIDS; FILM PREPARATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA APPLICATIONS; POLYMERIZATION; THIN FILMS;

PLASMA POLYMERIZED HEXAMETHYLDISILOXANE;

PLASTIC FILMS;

EID: 0032120530     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00492-1     Document Type: Article

References (16)

1. R. Szeto, D.W. Hess, J. Appl. Phys. 52 (1981) 903.
2. F.-O. Fong, H.C. Kuo, J.C. Wolfe, J.N. Randall, J. Vac. Sci. Technol. B6 (1988) 375.
3. N. Inagaki, T. Nishio, K. Katsuura, J. Polym. Sci. Polym. Lett. Ed. 18 (1980) 765.
4. M.W. Horn, S.W. Pang, M. Rothschild, J. Vac. Sci. Technol. B8 (1990) 1493.
5. A.M. Wrobel, J. Kowalski, J. Grebowicz, M. Kryszewski, J. Macromol. Sci. Chem. A17 (3) (1982) 433.
6. K. Kashiwagi, Y. Yoshida, Y. Murayama, Jpn. J. Appl. Phys. 30 (8) (1991) 1803.
7. T.S. Ramu, M.R. Wertheimer, J.-E. Klemberg-Sapieha, IEEE Trans. Electr. Insul. 21 (1986) 549.
8. M.R. Alexander, F.R. Jones, R.D. Short, J. Phys. Chem. B101 (1997) 3614.
9. M.R. Alexander, R.D. Short, F.R. Jones, M. Stollenwerk, J. Zabold, W. Michaeli, J. Mater. Sci. 31 (1996) 1879.
10. S. Cai, J. Fang, X. Yu, J. Appl. Polym. Sci. 44 (1992) 135.
11. F. Kokai, T. Kubota, M. Ichjyo, K. Wakai, J. Appl. Polym. Sci. Appl. Polym. Symp. 42 (1988) 197.
12. R.J. Keller, The Sigma Library of FTIR Spectra, Sigma Chemical Co., Inc., ed. 1, St. Louis, MO, Vol. 2, 1986, p. 979.
13. S.Y. Park, N. Kim, U.Y. Kim, S.I. Hong, H. Sasabe, Polymer (Korea) 16 (1) (1992) 94.
14. M. Ohuchi, A. Chiba, M. Date, T. Furukawa, Jpn. J. Appl. Phys. 22 (8) (1983) 1267.
15. R. Bartnikas, R.M. Eichhorn, Engineering Dielectrics, Volume IIA, ASTM Special Technical Publication, Philadelphia, PA, 1983.
16. R.B. Standler, Protection of Electronic Circuits from Overvoltages, Wiley, New York, 1989, p. 202.