Plasma deposition of low-stress electret films for electroacoustic and solar cell applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 5, 1996, Pages 2775-2779

  Klemberg Sapieha, J E ^a   Martinu, L ^a   Wertheimer, M R ^a   Gunther P ^b   Schellin, R ^b   Thielemann, C ^b   Sessler, G M ^b  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030486339     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580199     Document Type: Article

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