Design of microlens array on aperture stop array to generate multi optical probes with spatial light modulation

Japanese Journal of Applied Physics

Volumn 47, Issue 8 PART 2, 2008, Pages 6800-6803

  Min, Joong Hee ^a   Kim, Hokwan ^a   Kim, Byungwook ^a   Kang, Shinill ^a  

^a Yonsei University   (South Korea)

Author keywords

Aperture stop array; Aspherical microlens array; Multi optical probes; Spatial light modulator; UV imprinting process

Indexed keywords

JITTER; LIGHT MODULATION; MICROLENSES; MODULATION; OPTICAL INSTRUMENT LENSES; PHOTOLITHOGRAPHY;

APERTURE STOP ARRAY; ASPHERICAL MICROLENS ARRAY; MULTI OPTICAL PROBES; SPATIAL LIGHT MODULATOR; UV-IMPRINTING PROCESS;

LIGHT MODULATORS;

EID: 55149094956     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.6800     Document Type: Article

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