Resonantly enhanced addressing of a spatial light modulator micro-mirror array

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 663-666

  Ljungblad, Ulric ^a   Lock, Tomas ^a   Sandstrom, Tor ^a  

^a Micronic Laser Systems AB   (Sweden)

Author keywords

Mask writer; Micro mirror; Resonant addressing; Spatial light modulator

Indexed keywords

ELECTRODES; LITHOGRAPHY; MIRRORS; NATURAL FREQUENCIES; RESONANCE; ULTRAVIOLET RADIATION;

MASK WRITER; MICRO-MIRROR; RESONANT ADDRESSING; SPATIAL LIGHT MODULATOR;

LIGHT MODULATORS;

EID: 33646060416     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.12.031     Document Type: Article

References (3)

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2. T. Sandstrom, H. Martinsson, Proc. SPIE 5853 (2005) 1031-1042.
3. U. Dauderstädt, P. Durr, T. Karlin, H. Schenk, H. Lakner, Proc. SPIE 5348 (2004) 119-126.