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Thin Solid Films

Volumn 398-399, Issue , 2001, Pages 368-373

Phase changes of CrN films annealed at high temperature under controlled atmosphere

(2) Lu, F H a Chen, H Y a

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

Author keywords

Annealing; Chromium nitride; Oxidation; Phase transformation; Stress

Indexed keywords

ANNEALING; CHROMIUM COMPOUNDS; DEPOSITION; GIBBS FREE ENERGY; HIGH TEMPERATURE EFFECTS; OXIDATION; PHASE TRANSITIONS; SILICON WAFERS;

CATHODIC ARC PLASMA DEPOSITION;

THIN FILMS;

EID: 0035506787 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01346-3 Document Type: Conference Paper

Times cited : (83)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.