SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 517, Issue 2, 2008, Pages 622-625

Growth of nanoporous silicon dioxide thin films using porous alumina substrates

(2) Chen, Feng a Kitai, Adrian H a

a MCMASTER UNIVERSITY (Canada)

Author keywords

Nanoporous; Porous alumina; Self organized; Sputtering; Thin film

Indexed keywords

COST EFFECTIVENESS; MAGNETRON SPUTTERING; NETWORK PROTOCOLS; ORE TREATMENT; SEMICONDUCTING SILICON COMPOUNDS; SENSOR NETWORKS; SILICA; SILICON COMPOUNDS; SOLIDS; SUBSTRATES; THICK FILMS; THIN FILMS;

ALUMINA MEMBRANES; MAGNETRON SPUTTERING METHODS; NANOPOROUS; NANOPOROUS SILICON DIOXIDES; POROUS ALUMINA; POROUS ALUMINA MEMBRANES; POROUS ALUMINA SUBSTRATES; POROUS NETWORK STRUCTURES; POROUS SURFACES; SELF-ORGANIZED; THICKNESS OF THE FILMS;

POROUS SILICON;

EID: 55049112351 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2008.07.009 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.