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Volumn 47, Issue 6 PART 2, 2008, Pages 5185-5188
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Grain size effect on nanopattern formability in direct imprint
a
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Author keywords
Direct nanoimprint; Grain size; Metallic pattern; Nanoindenter
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Indexed keywords
ABS RESINS;
ALUMINA;
ALUMINUM;
FABRICATION;
FILMS;
GRAIN (AGRICULTURAL PRODUCT);
GRAIN SIZE AND SHAPE;
HARDNESS;
LIGHT METALS;
MECHANICAL PROPERTIES;
METALLIC SOAPS;
MICROSCOPIC EXAMINATION;
MICROSTRUCTURE;
NANOINDENTATION;
OPTICAL FILMS;
SOLIDS;
SURFACE TOPOGRAPHY;
THICK FILMS;
THIN FILMS;
ALUMINUM FILMS;
ALUMINUM THIN FILMS;
ATOMIC FORCES;
DEPOSITION PROCESSES;
DIRECT NANOIMPRINT;
FABRICATION METHODS;
FABRICATION PROCESSES;
FILM PROPERTIES;
GRAIN SIZE;
GRAIN SIZES;
INTERNAL DEFECTS;
METALLIC PATTERN;
METALLIC PATTERNS;
METALLIC THIN FILMS;
NANOIMPRINT PROCESSES;
NANOINDENTATION EXPERIMENTS;
NANOINDENTER;
NANOPATTERN;
PARAMETER CONTROLS;
SUBWAVELENGTH STRUCTURES;
PROCESS CONTROL;
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EID: 55049102377
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.5185 Document Type: Article |
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Times cited : (4)
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References (11)
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