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Volumn 517, Issue 2, 2008, Pages 800-804
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Tribological properties of undoped and boron-doped nanocrystalline diamond films
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Author keywords
Boron doping; Microwave Plasma Assisted Chemical Vapor Deposition; Nanocrystalline diamond; Tribology
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Indexed keywords
BIOSENSORS;
BORON;
DEFORMATION;
DIAMOND CUTTING TOOLS;
DIAMONDS;
ELECTROMAGNETIC WAVES;
FRICTION;
MICROELECTROMECHANICAL DEVICES;
MICROWAVES;
NANOCRYSTALLINE ALLOYS;
NANOCRYSTALLINE MATERIALS;
NANOSTRUCTURED MATERIALS;
NONMETALS;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PLASMA STABILITY;
PLASMAS;
SENSOR NETWORKS;
SYSTEM STABILITY;
TRIBOLOGY;
VAPORS;
AMBIENT AIRS;
ATOMIC FORCE MICROSCOPES;
BIOMEDICAL SENSORS;
COEFFICIENT OF FRICTIONS;
CRITICAL FAILURES;
DOPED NANOCRYSTALLINE DIAMONDS;
FILM DELAMINATIONS;
HIGH HARDNESSES;
MICRO-ELECTRO-MECHANICAL SYSTEMS;
MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION;
MICROWAVE PLASMAS;
NANOCRYSTALLINE;
NANOCRYSTALLINE DIAMOND;
NANOTRIBOMETER;
NCD FILMS;
NORMAL LOADS;
NORMAL STRESSES;
POLYCRYSTALLINE DIAMOND FILMS;
SLIDING;
SLIDING WEAR TESTS;
SURFACE DEFORMATIONS;
SYSTEMATIC STUDIES;
THERMAL STABILITIES;
TI-6AL-4V;
TRIBOLOGICAL PROPERTIES;
TUNABLE CONDUCTIVITIES;
UNDOPED FILMS;
WEAR RATES;
DIAMOND FILMS;
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EID: 55049096975
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2008.08.171 Document Type: Article |
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Times cited : (47)
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References (29)
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