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Volumn 83, Issue 24, 2003, Pages 5047-5049
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Effect of nitrogen addition on the morphology and structure of boron-doped nanostructured diamond films
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Author keywords
[No Author keywords available]
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Indexed keywords
BORON;
CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
HIGH TEMPERATURE APPLICATIONS;
HYDROGEN;
MECHANICAL PROPERTIES;
METHANE;
MORPHOLOGY;
NITROGEN;
PLASMAS;
TITANIUM ALLOYS;
X RAY DIFFRACTION ANALYSIS;
DIBORANE;
FILM MORPHOLOGY;
FULL WIDTH AT HALF MAXIMUM;
OPTICAL EMISSION SPECTROSCOPY;
PLASMA CHEMISTRY;
NANOSTRUCTURED MATERIALS;
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EID: 0346503153
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1633972 Document Type: Article |
Times cited : (14)
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References (15)
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