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Volumn 47, Issue 6 PART 2, 2008, Pages 5120-5122
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Development of focused ion beam machining systems for fabricating three-dimensional structures
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Author keywords
3 D; Focused ion beam (FIB); MEMS; Micromachining; Nanostruoture
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Indexed keywords
BEAM PLASMA INTERACTIONS;
BRIDGES;
COMPOSITE MICROMECHANICS;
ELECTROMAGNETIC WAVES;
FOCUSED ION BEAMS;
ION BEAMS;
ION BOMBARDMENT;
IONS;
MACHINING;
MICROMACHINING;
WATER POLLUTION;
3-D;
BRIDGE HEIGHTS;
DIMENSIONAL STRUCTURES;
ETCHING METHODS;
FOCUSED ION BEAM MACHINING;
IN-SITU;
LATERAL DIRECTIONS;
NANOSTRUOTURE;
THREE DIMENSIONAL;
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EID: 55049096178
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.5120 Document Type: Article |
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Times cited : (2)
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References (8)
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