Ultrasonic nanoimprint on poly(ethylene terephthalate) at room temperature

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5178-5184

  Mekaru, Harutaka ^a   Takahashi, Masaharu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Magnetostriction actuator; Nanoimprint lithography; Poly(ethylene terephthalate); Room temperature; Ultrasonic vibration

Indexed keywords

ABS RESINS; ACTUATORS; ETHYLENE; FORMING; GLASS TRANSITION; LATTICE VIBRATIONS; MAGNETIC FIELD EFFECTS; MAGNETOSTRICTION; MAGNETOSTRICTIVE DEVICES; MOLDING; MOLDS; PLASTICS FORMING; PLASTICS MOLDING; POLYETHYLENE TEREPHTHALATES; POLYMERS; POSITRON EMISSION TOMOGRAPHY; THERMOPLASTICS; ULTRASONIC APPLICATIONS; ULTRASONIC WAVES; ULTRASONICS; ULTRAVIOLET RADIATION;

CONTACT FORCES; CONTACT TIMES; ENGINEERING PLASTICS; GLASS TRANSITION TEMPERATURES; KEY TECHNOLOGIES; LONGITUDINAL ULTRASONIC; MASS PRODUCTIONS; MOLD PATTERNS; MOLDING MATERIALS; POLY(ETHYLENE TEREPHTHALATE); ROOM TEMPERATURE; ROOM TEMPERATURES; ULTRASONIC; ULTRASONIC VIBRATION; ULTRASONIC VIBRATIONS; ULTRAVIOLET LIGHTS;

NANOIMPRINT LITHOGRAPHY;

EID: 55049088203     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5178     Document Type: Article

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