Nanoimprint lithography combined with ultrasonic vibration on polycarbonate

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 9 B, 2007, Pages 6355-6362

  Mekaru, Harutaka ^a   Noguchi, Toshihiko ^a   Goto, Hiroshi ^a   Takahashi, Masaharu ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Glass transition temperature; MEMS fabrication technology; Nanoimprint lithography; Polycarbonate; Ultrasonic vibration

Indexed keywords

GLASS TRANSITION; MEMS; POLYCARBONATES; SUBSTRATES; THERMAL EFFECTS; ULTRASONIC WAVES;

MEMS FABRICATION TECHNOLOGY; ULTRASONIC VIBRATION;

NANOIMPRINT LITHOGRAPHY;

EID: 34648815920     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6355     Document Type: Article

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